Normal view
MARC view
Entry Topical Term
001 - CONTROL NUMBER
- control field: 25152
003 - CONTROL NUMBER IDENTIFIER
- control field: OSt
005 - DATE AND TIME OF LATEST TRANSACTION
- control field: 20220615154253.0
008 - FIXED-LENGTH DATA ELEMENTS
- fixed length control field: 220615|| aca||aabn | a|a d
040 ## - CATALOGING SOURCE
- Original cataloging agency: OSt
- Transcribing agency: OSt
150 ## - HEADING--TOPICAL TERM
- Topical term or geographic name entry element: Radio-frequency sputtering
670 ## - SOURCE DATA FOUND
- Source citation: Work cat.: (OSt)43760: Uchibori, Chihiro J. 25148, Effects of deposition sequence on electrical properties of InAs-Ni-W ohmic contacts to n-type GaAs /